Chemical Reactions Induced By Soft X-Ray And E-Beam Exposure Of Novolac-Based Resists

Derrick C. Mancini; James W. Taylor; T. V. Jayaraman; Richard J. West

doi:10.1117/12.968338

1 January 1988 Chemical Reactions Induced By Soft X-Ray And E-Beam Exposure Of Novolac-Based Resists

Derrick C. Mancini, James W. Taylor, T. V. Jayaraman, Richard J. West

Proceedings Volume 0920, Advances in Resist Technology and Processing V; (1988) https://doi.org/10.1117/12.968338
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

X-ray exposure of selected novolac resins and commercial novolac-based resists show more varied end products and more crosslinking reactions than observed in the UV exposure. E-beam and x-ray induced reactions are somewhat similar. Novolac resin without the photoactive component (PAC) was shown to crosslink suggesting that x-ray and e-beam mechanisms must take this into account. Difference FTIR spectra were indicative of the structural changes. Mass spectrometry was less effective because of the volatility of PAC, although novolac resin without PAC was shown to contribute to the gaseous byproducts of exposure. The role of crosslinking of the novolac resin in process latitude and image reversal is discussed.

Citation Download Citation

Derrick C. Mancini, James W. Taylor, T. V. Jayaraman, and Richard J. West "Chemical Reactions Induced By Soft X-Ray And E-Beam Exposure Of Novolac-Based Resists", Proc. SPIE 0920, Advances in Resist Technology and Processing V, (1 January 1988); https://doi.org/10.1117/12.968338

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