Concept for a highly miniaturized endoscopic point distance sensor

Korbinian Prause; Simon Thiele; Alois Herkommer; Harald Giessen; Bernd Pinzer; Michael Layh

doi:10.1117/12.2525573

21 June 2019 Concept for a highly miniaturized endoscopic point distance sensor

Korbinian Prause, Simon Thiele, Alois Herkommer, Harald Giessen, Bernd Pinzer, Michael Layh

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110560M (2019) https://doi.org/10.1117/12.2525573
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Increasing miniaturization requires improved and highly miniaturized optical 3D metrology systems. In this paper a basic measurement principle and a proposed optical design of a highly miniaturized endoscopic spatial confocal point distance sensor are presented. The sensor uses a, to our knowledge new technique called spatial confocal point distance measurement. A special feature of the proposed sensor design is the high degree of miniaturization, through femtosecond direct laser writing and the use of optical fiber bundles, which enable an endoscopic application.

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Citation Download Citation

Korbinian Prause, Simon Thiele, Alois Herkommer, Harald Giessen, Bernd Pinzer, and Michael Layh "Concept for a highly miniaturized endoscopic point distance sensor", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560M (21 June 2019); https://doi.org/10.1117/12.2525573

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