Formation of micro-groove on diamond by femtosecond laser micromachining

Ryoji Maruyama; Takayuki Tamaki; Wataru Watanabe

doi:10.1117/12.2542281

31 December 2019 Formation of micro-groove on diamond by femtosecond laser micromachining

Ryoji Maruyama, Takayuki Tamaki, Wataru Watanabe

Proceedings Volume 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019; 112011N (2019) https://doi.org/10.1117/12.2542281
Event: ANZCOP, 2019, Melbourne, Australia

Abstract

Laser processing of diamond have attracted attention. Ultrashort laser pulses can be used for micro-structuring on diamond and in bulk diamond. In this paper, we report on laser parameters for surface structuring of diamond by using femtosecond laser pluses at a repetition rate of 1 kHz. By changing scanning speed and energy, different types of grooves were inscribed. The morphology and depth of grooves were investigated.

Citation Download Citation

Ryoji Maruyama, Takayuki Tamaki, and Wataru Watanabe "Formation of micro-groove on diamond by femtosecond laser micromachining", Proc. SPIE 11201, SPIE Micro + Nano Materials, Devices, and Applications 2019, 112011N (31 December 2019); https://doi.org/10.1117/12.2542281

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