Back-illuminated modified uni-traveling-carrier photo-diodes (MUTC-PDs) with 3-dB bandwidth over 40 GHz

Zheng Zhen; Ran Hao; Dong Xing; Zhihong Feng; Shangzhong Jin; Erping Li

doi:10.1117/12.2585422

4 December 2020 Back-illuminated modified uni-traveling-carrier photo-diodes (MUTC-PDs) with 3-dB bandwidth over 40 GHz

Zheng Zhen, Ran Hao, Dong Xing, Zhihong Feng, Shangzhong Jin, Erping Li

Proceedings Volume 11617, International Conference on Optoelectronic and Microelectronic Technology and Application; 1161731 (2020) https://doi.org/10.1117/12.2585422
Event: International Conference on Optoelectronic and Microelectronic Technology and Application, 2020, Nanjing, China

Abstract

InP-based back-illuminated modified uni-traveling-carrier photodiodes (MUTC-PDs) with high-speed and highresponsivity are demonstrated using flip-chip technology in this letter. The partially depleted absorption layer with gradual doping and cliff layer are utilized to realize large 3-dB bandwidth. A high responsivity of 0.54 A/W with over 40 GHz large 3-dB bandwidth from a 7-μm-diameter back-illuminated MUTC-PD is achieved. The results demonstrate that the modified design can effectively enhance the internal electric field and concentration gradient, so as to optimize the response speed of the device.

Citation Download Citation

Zheng Zhen, Ran Hao, Dong Xing, Zhihong Feng, Shangzhong Jin, and Erping Li "Back-illuminated modified uni-traveling-carrier photo-diodes (MUTC-PDs) with 3-dB bandwidth over 40 GHz", Proc. SPIE 11617, International Conference on Optoelectronic and Microelectronic Technology and Application, 1161731 (4 December 2020); https://doi.org/10.1117/12.2585422

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