Detection and analysis of airborne acoustic signals in direct laser interference patterning

Tobias Steege; Sabri Alamri; Andrés Fabián Lasagni; Udo Klotzbach; Tim Kunze

doi:10.1117/12.2587162

5 March 2021 Detection and analysis of airborne acoustic signals in direct laser interference patterning

Tobias Steege, Sabri Alamri, Andrés Fabián Lasagni, Udo Klotzbach, Tim Kunze

Proceedings Volume 11674, Laser-based Micro- and Nanoprocessing XV; 1167405 (2021) https://doi.org/10.1117/12.2587162
Event: SPIE LASE, 2021, Online Only

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Tobias Steege, Sabri Alamri, Andrés Fabián Lasagni, Udo Klotzbach, and Tim Kunze "Detection and analysis of airborne acoustic signals in direct laser interference patterning", Proc. SPIE 11674, Laser-based Micro- and Nanoprocessing XV, 1167405 (5 March 2021); https://doi.org/10.1117/12.2587162

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