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1 August 2021 Pseudo- planar Ge-on-Si single-photon avalanche detectors with low noise equivalent power
Jaroslaw Kirdoda, Ross William Millar, Fiona Thorburn, Laura L. Huddleston, Derek C. S. Dumas, Zoë M. Greener, Kateryna Kuzmenko, Peter Vines, Lourdes Ferre Llin, Xin Yi, Scott Watson, Bhavana Benakaprasad, Gerald S. Buller, Douglas J. Paul
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Proceedings Volume 11831, Infrared Sensors, Devices, and Applications XI; 1183107 (2021) https://doi.org/10.1117/12.2594639
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States
Abstract
We present a pseudo-planar geometry 26µm diameter Ge-on-Si single-photon avalanche diode (SPAD) detector with temperature insensitive single photon detection efficiency of 29.4% at 1310nm wavelength for applications including free-space LIDAR. A record low dark count rate of 104 counts/s at 125K at an excess bias of 6.6% is demonstrated, with temporal jitter reaching 134ps. The noise-equivalent power is measured to be 7.7x10-17WHz-12 which is a 2 orders of magnitude reduction when compared to comparable 25µm mesa devices. This device represents the state-of-the-art for Ge-on-Si SPADs, and highlights that these Si foundry compatible devices have enormous potential for SWIR single-photon applications.
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Jaroslaw Kirdoda, Ross William Millar, Fiona Thorburn, Laura L. Huddleston, Derek C. S. Dumas, Zoë M. Greener, Kateryna Kuzmenko, Peter Vines, Lourdes Ferre Llin, Xin Yi, Scott Watson, Bhavana Benakaprasad, Gerald S. Buller, and Douglas J. Paul "Pseudo- planar Ge-on-Si single-photon avalanche detectors with low noise equivalent power", Proc. SPIE 11831, Infrared Sensors, Devices, and Applications XI, 1183107 (1 August 2021); https://doi.org/10.1117/12.2594639
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KEYWORDS
Sensors
LIDAR
Short wave infrared radiation
Air contamination
Avalanche photodiodes
Fiber optic gyroscopes
Infrared radiation
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