Surface evaluation of high-precision monolithic mirror for soft x-ray focusing

T. Kume; Y. Matsuzawa; K. Hiraguri; Y. Takeo; T. Kimura; H. Kishimoto; Y. Senba; H. Ohashi; H. Hashizume; H. Mimura

doi:10.1117/12.2633765

4 October 2022 Surface evaluation of high-precision monolithic mirror for soft x-ray focusing

T. Kume, Y. Matsuzawa, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Hashizume, H. Mimura

Proceedings Volume 12240, Advances in X-Ray/EUV Optics and Components XVII; 122400G (2022) https://doi.org/10.1117/12.2633765
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States

Abstract

For application in the soft X-ray region, focusing mirrors having a steep shape with small radii of curvature of several tens to hundreds of millimeters and a deep sag of a few millimeters have recently been designed. These mirrors are difficult to fabricate with high accuracy owing to the challenges in figure measurement. In this study, we demonstrate the surface measurement of a flat substrate and soft X-ray Wolter mirror using a tactile profiler. The comparison with a stitching interferometry image of the flat substrate showed an agreement of mid- to high-spatial-frequency errors. The tactile measurement of the Wolter mirror exhibited a root-mean-square figure error of 2.49 nm.

Conference Presentation

Citation Download Citation

T. Kume, Y. Matsuzawa, K. Hiraguri, Y. Takeo, T. Kimura, H. Kishimoto, Y. Senba, H. Ohashi, H. Hashizume, and H. Mimura "Surface evaluation of high-precision monolithic mirror for soft x-ray focusing", Proc. SPIE 12240, Advances in X-Ray/EUV Optics and Components XVII, 122400G (4 October 2022); https://doi.org/10.1117/12.2633765

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