SiN optical phased array based on slab waveguide

Pengfei Ma; Pengfei Wang; Guangzhen Luo; Lei Yu; Langlin Cui; Xuliang Zhou; Jiaoqing Pan; Yejin Zhang

doi:10.1117/12.2642005

4 January 2023 SiN optical phased array based on slab waveguide

Pengfei Ma, Pengfei Wang, Guangzhen Luo, Lei Yu, Langlin Cui, Xuliang Zhou, Jiaoqing Pan, Yejin Zhang

Proceedings Volume 12322, Nanophotonics, Micro/Nano Optics, and Plasmonics VIII; 123220L (2023) https://doi.org/10.1117/12.2642005
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

Optical phased array has the advantages of low cost, small size, and high stability. It has broad application prospects in Lidar, free space optical communication, and so on. Among all of them, SiN photonic integrated circuit platforms have received much research. Compared to Si, SiN has smaller optical nonlinear effects and waveguide losses, allowing higher optical power to be emitted. However, the refractive index of SiN is smaller than Si. The pitch of SiN-based waveguides and waveguide grating antennas is larger to reduce crosstalk. This results in a smaller field of view for SiN optical phased arrays and reduces the power ratio of the main lobe to the total emission. In this work, we spaced two SiN waveguides with different propagation constants to reduce the coupling strength between adjacent waveguides. In the range of 1500 nm to 1600 nm, the crosstalk is smaller than -29 dB at the waveguide pitch of 2 μm. In this case, the field of view of the optical phased array reaches 43.89° × 8.47° (ψ × θ). For the optical phased array with 512 channels and a 1 mm long antenna, the divergence angle is 0.078° × 0.086° (Δψ × Δθ). The small spot achieves higher resolution and high point cloud density.

Citation Download Citation

Pengfei Ma, Pengfei Wang, Guangzhen Luo, Lei Yu, Langlin Cui, Xuliang Zhou, Jiaoqing Pan, and Yejin Zhang "SiN optical phased array based on slab waveguide", Proc. SPIE 12322, Nanophotonics, Micro/Nano Optics, and Plasmonics VIII, 123220L (4 January 2023); https://doi.org/10.1117/12.2642005

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