Optical three-dimensional sensing for measurement of bottomhole pattern

Wan-Yong Su; Xianyu Su

doi:10.1117/12.51059

1 January 1991 Optical three-dimensional sensing for measurement of bottomhole pattern

Wan-Yong Su, Xianyu Su

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51059
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

We describe an optical 3-0 sensing system by PMP for 3-D shape measurement of bottoihole pattern.The principle,system construction and experiaental results are described briefly.

Citation Download Citation

Wan-Yong Su and Xianyu Su "Optical three-dimensional sensing for measurement of bottomhole pattern", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51059

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