Phase-stepping DIC technique for reflecting surface evaluation

Malgorzata Sochacka; Leszek Rafal Staronski

doi:10.1117/12.171879

3 May 1994 Phase-stepping DIC technique for reflecting surface evaluation

Malgorzata Sochacka, Leszek Rafal Staronski

Proceedings Volume 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications; (1994) https://doi.org/10.1117/12.171879
Event: Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, 1992, Warsaw, Poland

Abstract

The phase stepping DIC technique is proposed for the surface profiling of highly polished optical substrata. An easy implementation is described in a commercially available polarized light interference microscope for reflected light. Experimental results are presented.

Citation Download Citation

Malgorzata Sochacka and Leszek Rafal Staronski "Phase-stepping DIC technique for reflecting surface evaluation", Proc. SPIE 1846, Phase Contrast and Differential Interference Contrast Imaging Techniques and Applications, (3 May 1994); https://doi.org/10.1117/12.171879

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