Noncontact profiling of machined metal surfaces by fiber optic interferometry

Duncan P. Hand; Thomas A. Carolan; James S. Barton; Julian D. C. Jones

doi:10.1117/12.194306

15 November 1994 Noncontact profiling of machined metal surfaces by fiber optic interferometry

Duncan P. Hand, Thomas A. Carolan, James S. Barton, Julian D. C. Jones

Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194306
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany

Abstract

A rugged interferometric fiber optic instrument for non-contact profiling of optically rough, machined metal surfaces has been developed, designed for use on the machine tool. The sensor is a robust and compact interferometric probe which scans focused light across the test surface. A laser diode source and photodetector communicate with the sensor through an optical fiber, and the output is demodulated with a phase-stepping algorithm, achieved by frequency modulating the source. Operation is demonstrated with face-milled steel surfaces, with steep local gradients and local variations in reflectivity of a factor of 100,000. The measured horizontal resolution is 1.5 micrometers , and the noise-limited vertical resolution 0.3 nm/(root)Hz. Two additional manufacturing applications are demonstrated: in-situ profiling of diamond-machined surfaces and score dies.

Citation Download Citation

Duncan P. Hand, Thomas A. Carolan, James S. Barton, and Julian D. C. Jones "Noncontact profiling of machined metal surfaces by fiber optic interferometry", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194306

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