Dynamic gas chemistry simulator for vacuum systems

James Durham; Steve Felker

doi:10.1117/12.324366

3 September 1998 Dynamic gas chemistry simulator for vacuum systems

James Durham, Steve Felker

Proceedings Volume 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV; (1998) https://doi.org/10.1117/12.324366
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

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James Durham and Steve Felker "Dynamic gas chemistry simulator for vacuum systems", Proc. SPIE 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, (3 September 1998); https://doi.org/10.1117/12.324366

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