Laser resistivity and causes of damage in coating materials for 193 nm by photothermal methods

Holger Blaschke; Roland Thielsch; Joerg Heber; Norbert Kaiser; Sven Martin; Eberhard Welsch

doi:10.1117/12.344383

7 April 1999 Laser resistivity and causes of damage in coating materials for 193 nm by photothermal methods

Holger Blaschke, Roland Thielsch, Joerg Heber, Norbert Kaiser, Sven Martin, Eberhard Welsch

Proceedings Volume 3578, Laser-Induced Damage in Optical Materials: 1998; (1999) https://doi.org/10.1117/12.344383
Event: Laser-Induced Damage in Optical Materials: 1998, 1998, Boulder, CO, United States

Abstract

The aim of our investigation was to explain the causes and kinds of the destruction of optical coatings during laser radiation at the wavelength of ArF excimer laser. Therefore, HR layer stacks with an increasing number of HL-pairs were deposited on different substrates CaF₂ and fused silica, respectively. SiO₂/Al₂O₃-, LaF₃/MgF₂- and AlF₃/LaF₃-combinations were used as coating materials. While fluoride coatings have been deposited by conventional evaporation, the oxide coatings were deposited by reactive e-beam evaporation with or without plasma ion assistance. The interaction of UV laser radiation with optical coatings as mentioned above was investigated by a pulsed two probe beam photothermal technique as well as optical microscopy, respectively. In the case of fluoride layers the single shot damage threshold increases with higher number of HL-pairs. Additionally, an aging effect could be observed.

Citation Download Citation

Holger Blaschke, Roland Thielsch, Joerg Heber, Norbert Kaiser, Sven Martin, and Eberhard Welsch "Laser resistivity and causes of damage in coating materials for 193 nm by photothermal methods", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available