Laser-induced writing of electrically conductive structures in the surface of AIN

Beate Stolz; Ernst-Wolfgang Kreutz; Reinhart Poprawe

doi:10.1117/12.352793

12 July 1999 Laser-induced writing of electrically conductive structures in the surface of AIN

Beate Stolz, Ernst-Wolfgang Kreutz, Reinhart Poprawe

Proceedings Volume 3675, Smart Structures and Materials 1999: Smart Materials Technologies; (1999) https://doi.org/10.1117/12.352793
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

A laser-assisted process that enables the direct production of electrically conductive structures in the surface of aluminium nitride (AlN)-substrates is presented. The modification of the surface conductivity of AlN is performed by using pulsed excimer laser radiation. The process is systemically examined concerning its dependence on the processing variables. In order to characterize the modification the laser-treated specimens are analyzed with respect to electrical conductivity, chemical composition including factor analysis, X-ray-photoelectron-spectroscopy and electron beam microprobe analysis, structure and morphology.

Citation Download Citation

Beate Stolz, Ernst-Wolfgang Kreutz, and Reinhart Poprawe "Laser-induced writing of electrically conductive structures in the surface of AIN", Proc. SPIE 3675, Smart Structures and Materials 1999: Smart Materials Technologies, (12 July 1999); https://doi.org/10.1117/12.352793

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