Metrology methods for quantifying edge roughness: II

Carla M. Nelson-Thomas; Susan C. Palmateer; Anthony R. Forte; Susan G. Cann; S. Deneault; Theodore M. Lyszczarz

doi:10.1117/12.350860

14 June 1999 Metrology methods for quantifying edge roughness: II

Carla M. Nelson-Thomas, Susan C. Palmateer, Anthony R. Forte, Susan G. Cann, S. Deneault, Theodore M. Lyszczarz

Proceedings Volume 3677, Metrology, Inspection, and Process Control for Microlithography XIII; (1999) https://doi.org/10.1117/12.350860
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Advanced scanning electron and atomic force microscopy technique have been developed to quantify line-edge and sidewall roughness in patterned resist and silicon feature with nanometer scale accuracy. Both techniques are able to follow small changes in the line-edge roughness. The measurement repeatability of the scanning electron and atomic force microscope was characterized and is 0.1 and 0.6 nm, respectively. Any roughness measured in the single layer resist mask transfers to the underlying silicon throughout a range of pattern transfer conditions. Within the measurement precision, silicon pattern transfer does not appear to decrease or increase the sidewall or line-edge roughness. An attempt to quantify the edge-roughness spatial frequency is discussed. The scanning electron microscope is still recommended over the atomic force microscope for line-edge roughness measurements based on sample throughput.

Citation Download Citation

Carla M. Nelson-Thomas, Susan C. Palmateer, Anthony R. Forte, Susan G. Cann, S. Deneault, and Theodore M. Lyszczarz "Metrology methods for quantifying edge roughness: II", Proc. SPIE 3677, Metrology, Inspection, and Process Control for Microlithography XIII, (14 June 1999); https://doi.org/10.1117/12.350860

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available