Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate

TaeSun Lim; Yong-Kweon Kim

doi:10.1117/12.364447

29 September 1999 Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate

TaeSun Lim, Yong-Kweon Kim

Author Affiliations +

Proceedings Volume 3891, Electronics and Structures for MEMS; (1999) https://doi.org/10.1117/12.364447
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

A vertical spring-type micromirror was fabricated using a SiO₂ shielding screen structure. The fabricated vertical springs are well defined but the mirror plate is bent because the mirror plate is composed of SiO₂ and aluminum layers. To obtain a flat mirror plate, the stress of SiO₂ and aluminum is analyzed and the bending deflection of mirror plate's edge is measured. The measured deflection varies with the thickness of aluminum. Another SiO₂ layer on the mirror aluminum improved the flatness of mirror plate.

Citation Download Citation

TaeSun Lim and Yong-Kweon Kim "Fabrication of vertical-spring-type micromirror with SiO2 shielding screen and composite-layered mirror plate", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); https://doi.org/10.1117/12.364447

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