UV laser ablative shaping of optical surface using ArF laser

Takahisa Jitsuno; Keiu Tokumura; Hisashi Tamamura

doi:10.1117/12.405709

6 November 2000 UV laser ablative shaping of optical surface using ArF laser

Takahisa Jitsuno, Keiu Tokumura, Hisashi Tamamura

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405709
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

A new scheme for phase control of optical components using laser ablation shaping (LAS) has been developed. The surface shape of optical plastic material coated on a glass plate is ablated using 193 nm laser light to control the transmission wave front. The surface shape is monitored in situ and corrected to attain the desired aberration level. The irradiation fluence is about 40 mJ/cm², and the ablation depth per pulse is about 0.01 micrometers per pulse for UV-cured resin. A wave front aberration of 3.0(lambda) is reduced to 0.17(lambda) in the case of flat surface shaping. In the case of spherical surface generation, an aberration of 2.5(lambda) is reduced to 0.2(lambda) . Increase in surface roughness is kept within the acceptable levels. This scheme has been applied to the fabrication of micro-optical elements for the collimation of laser diode (LD) or single mode optical fiber (SMF). In the case of LD lens, micro- collimate lens was placed at the output surface of LD, and the wave-front error was measured with Shack Hrtmass wave- front sensor. In the case of SMF, small lens was formed directly at the output surface with UV-cured resin. The laser beam was focused to 250 micrometers in radius for micro- fabrication. The wave-front distortion was decreased from about 15(lambda) to less than 2(lambda) in mm size lens.

Citation Download Citation

Takahisa Jitsuno, Keiu Tokumura, and Hisashi Tamamura "UV laser ablative shaping of optical surface using ArF laser", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405709

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