High-precision surface profiling with broadband accordion fringe interferometry

Gary J. Swanson; Matthew P. Kavalauskas; Lyle G. Shirley

doi:10.1117/12.417193

12 February 2001 High-precision surface profiling with broadband accordion fringe interferometry

Gary J. Swanson, Matthew P. Kavalauskas, Lyle G. Shirley

Proceedings Volume 4189, Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology; (2001) https://doi.org/10.1117/12.417193
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

Accordion fringe interferometry (AFI) is an active-triangulation, surface-profiling technique based on projecting interference fringes onto the surface ofan object from a source at one location and viewing with a camera at another location. Interference fringes have the advantage of infinite depth of field, which allows large or complex objects to be illuminated without the need for source focus. Conventional AFI produces the interference fringes by using a laser to form two mutually coherent source points. Coherent illumination, however, produces speckle in the image that limits range resolution. A technique that significantly improves the range resolution ofAFI is described and demonstrated experimentally. This technique uses broadband illumination to eliminate speckle effects, while maintaining the advantages of interference-fringe projection.

Citation Download Citation

Gary J. Swanson, Matthew P. Kavalauskas, and Lyle G. Shirley "High-precision surface profiling with broadband accordion fringe interferometry", Proc. SPIE 4189, Machine Vision and Three-Dimensional Imaging Systems for Inspection and Metrology, (12 February 2001); https://doi.org/10.1117/12.417193

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