Paper
28 September 2001 Lamb waves generated by laser
Yihui Wu, Hongguang Jia, Hui Ju
Author Affiliations +
Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442967
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
A modulated continues wave argon ion laser has been used to get lamb waves in silicon membrane. In this report, the basic principle of conversation from optics to thermal then acoustic waves was deduced. The experimental set-up, the analysis of the results and the possible way to obtain a given mode of lamb wave were described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yihui Wu, Hongguang Jia, and Hui Ju "Lamb waves generated by laser", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442967
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KEYWORDS
Modulation

Silicon

Reflectivity

Diffusion

Thermography

Acoustics

Argon ion lasers

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