Method to achieve large displacements using comb drive actuators

Guangya Zhou; Duongsin Low; Philip Dowd

doi:10.1117/12.442975

28 September 2001 Method to achieve large displacements using comb drive actuators

Guangya Zhou, Duongsin Low, Philip Dowd

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442975
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The electromechanical side-instability and the stable travel range of comb-drive actuators are investigated. The stable travel range depends on the finger gap spacing, the initial finger overlap, and the spring stiffness ratio of the compliant suspension. Proper design of the suspension structure is the most effective way to stabilize the actuator and therefore to achieve a large deflection. In this paper, an improved suspension design, so called tilted folded-beam suspension, is proposed. The expressions for the spring constants of the proposed suspension both in and perpendicular to the stroke direction are given. Using such suspension, the stability of the comb-drive actuator is improved and the stable travel range is enhanced. Comb drive actuators with various tilted folded-beam suspensions were fabricated using the standard surface micromachining technology and their operational performances were characterized. The experimental results are in good agreement with the theoretical predictions.

Citation Download Citation

Guangya Zhou, Duongsin Low, and Philip Dowd "Method to achieve large displacements using comb drive actuators", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442975

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