Oscillation characteristics of a discharge pumped VUV Kr excimer laser

Takahiro Shirai; Takeshi Higashiguchi; Shoichi Kubodera; Wataru Sasaki; Junji Kawanaka; Tatsushi Igarashi

doi:10.1117/12.515513

10 November 2003 Oscillation characteristics of a discharge-pumped VUV Kr excimer laser

Takahiro Shirai, Takeshi Higashiguchi, Shoichi Kubodera, Wataru Sasaki, Junji Kawanaka, Tatsushi Igarashi

Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515513
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland

Abstract

We have used a pair of newly constructed electrodes to improve the discharge stability and electrical input power. The electrode shape was designed so that the discharge width became narrower, which lead to the increase of the input power density by 22%. As a result, the maximum output energy increased from 150 to 200 μJ at 147.8 nm. The pulse duration of 250 ns (FWHM) became shorter compared to the previous result (400 ns). This long pulse operation indicated the laser oscillation in an afterglow mode. The laser beam shape was circular with a beam divergence of 2.5 mrad. Because of the long pulse duration, this beam shape reflected on a cavity mode (multi-mode) as a result of the optical feedback. A small signal gain coefficient increased almost linearly with the increase of the discharge voltage. The maximum gain coefficient at 147.8 nm was 3.5%cm^-1at 31 kV.

Citation Download Citation

Takahiro Shirai, Takeshi Higashiguchi, Shoichi Kubodera, Wataru Sasaki, Junji Kawanaka, and Tatsushi Igarashi "Oscillation characteristics of a discharge-pumped VUV Kr excimer laser", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); https://doi.org/10.1117/12.515513

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