Enhancing DRAM printing process window by using inverse lithography technology (ILT)

Chih-Wei Chu; Becky Tsao; Karl Chiou; Snow Lee; Jerry Huang; Yong Liu; Timothy Lin; Andrew Moore; Linyong Pang

doi:10.1117/12.657015

20 March 2006 Enhancing DRAM printing process window by using inverse lithography technology (ILT)

Chih-Wei Chu, Becky Tsao, Karl Chiou, Snow Lee, Jerry Huang, Yong Liu, Timothy Lin, Andrew Moore, Linyong Pang

Proceedings Volume 6154, Optical Microlithography XIX; 61543O (2006) https://doi.org/10.1117/12.657015
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

Inverse lithography technology (ILT) was studied during process development for four layers from memory semiconductor designs. This paper describes techniques used in each of the layers. So as to demonstrate this technology in a wide range of semiconductor patterns, we show results from all four layers. Polysilicon was chosen to demonstrate the selection of exposure/defocus (ED) points for constraining the inversion. Marking process window boundaries during a mask creation run was demonstrated on a contact hole layer. With a deep trench layer, mask constraints were varied and write times studied. Lastly, wafer SEM images were collected for an active layer to explore image fidelity though focus and CD stability along a line.

Citation Download Citation

Chih-Wei Chu, Becky Tsao, Karl Chiou, Snow Lee, Jerry Huang, Yong Liu, Timothy Lin, Andrew Moore, and Linyong Pang "Enhancing DRAM printing process window by using inverse lithography technology (ILT)", Proc. SPIE 6154, Optical Microlithography XIX, 61543O (20 March 2006); https://doi.org/10.1117/12.657015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available