Paper
4 January 2008 Reflective terahertz en-face tomography
Xinke Wang, Ye Cui, Wenfeng Sun, Yan Zhang
Author Affiliations +
Abstract
In this presentation, a system for THz en-face tomography imaging is proposed. The THz radiation reflected by the object is imaged on the ZnTe crystal, and then a CCD is used to detect the two dimensional modulated probe light. By adjusting the delay line, the information about the object can be achieved layer by layer. Expanded terahertz pulses are reflected from the different medium interfaces inside a sample, the amplitudes and time decays of these pulses can be used to determine the thickness of each medium inside the sample. In this way, the structure image of the sample can be reconstructed. The longitudinal resolution of the system is discussed by using the timing information of the reflection terahertz pulses.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xinke Wang, Ye Cui, Wenfeng Sun, and Yan Zhang "Reflective terahertz en-face tomography", Proc. SPIE 6840, Terahertz Photonics, 68400F (4 January 2008); https://doi.org/10.1117/12.760136
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KEYWORDS
Terahertz radiation

Silicon

Semiconducting wafers

Mirrors

Tomography

Imaging systems

Reflectivity

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