Paper
2 February 2009 Fabrication of 1-dimension nano-material-based device and its electrical characteristics
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Abstract
In recent years, many kinds of 1-dimension nano-materials (Carbon nanotube, ZnO nanobelt and nanowire etc.) continue to emerge which exhibit distinct and unique electromechanical, piezoelectric, photoelectrical properties. In this paper, a 1-dimension nano-materials-based device was proposed. The bottom-up and top-down combined process were used for constructing CNT-array-based device and ZnO nanowire device. The electrical characteristics of the 1D nano-materials-based devices were also investigated. The measurement results of electrical characteristics demonstrate that it is ohm electrical contact behavior between the nano-material and micro-electrodes in the proposed device which also have the field effect. The proposed 1D nano-material-based device shows the application potential in the sensing fields.
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Xing Yang, Zhaoying Zhou, Fuzhong Zheng, and Min Zhang "Fabrication of 1-dimension nano-material-based device and its electrical characteristics", Proc. SPIE 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 71590Q (2 February 2009); https://doi.org/10.1117/12.812006
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KEYWORDS
Electrodes

Zinc oxide

Nanowires

Carbon nanotubes

Nanolithography

Gold

Dielectrophoresis

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