Multispectral characterization of diffractive micromirror arrays

Dirk Berndt; Jörg Heber; Steffen Sinning; Detlef Kunze; Jens Knobbe; Jan-Uwe Schmidt; Martin Bring; Dirk Rudloff; Martin Friedrichs; Jana Rössler; Mark Eckert; Wolfram Kluge; Hannes Neumann; Michael Wagner; Hubert Lakner

doi:10.1117/12.854382

14 May 2010 Multispectral characterization of diffractive micromirror arrays

Dirk Berndt, Jörg Heber, Steffen Sinning, Detlef Kunze, Jens Knobbe, Jan-Uwe Schmidt, Martin Bring, Dirk Rudloff, Martin Friedrichs, Jana Rössler, Mark Eckert, Wolfram Kluge, Hannes Neumann, Michael Wagner, Hubert Lakner

Author Affiliations +

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180Q (2010) https://doi.org/10.1117/12.854382
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

The present article discusses an optical concept for the characterization of diffractive micromirror arrays (MMAs) within an extended wavelength range from the deep ultra-violet up to near-infrared. The task derives from the development of a novel class of MMAs that will support programmable diffractive properties between 240 nm and 800 nm. The article illustrates aspects of the achromatic system design that comprises the reflective beam homogenization with divergence control and coherence management for an appropriate MMA illumination as well as the transfer of phase modulating MMA patterns into intensity profiles for contrast imaging. Contrast measurements and grey scale imaging demonstrate the operation of the characterization system and reflect the encouraging start of technology development for multispectral, diffractive MMAs.

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Dirk Berndt, Jörg Heber, Steffen Sinning, Detlef Kunze, Jens Knobbe, Jan-Uwe Schmidt, Martin Bring, Dirk Rudloff, Martin Friedrichs, Jana Rössler, Mark Eckert, Wolfram Kluge, Hannes Neumann, Michael Wagner, and Hubert Lakner "Multispectral characterization of diffractive micromirror arrays", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180Q (14 May 2010); https://doi.org/10.1117/12.854382

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