Bridge type and cantilever type MEMS switch structures

D. Vasilache; G. Boldeiu; V. Moagar; Catalin Tibeica

doi:10.1117/12.881776

3 December 2010 Bridge type and cantilever type MEMS switch structures

D. Vasilache, G. Boldeiu, V. Moagar, Catalin Tibeica

Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 78210N (2010) https://doi.org/10.1117/12.881776
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania

Abstract

The aim of this paper is to present two different types of MEMS switch structures developed in IMT: bridge and cantilever. For these two configurations were chosen different length of bridges and cantilevers; also, for the actuation pads used were considered different size. Finite Element Method simulations were performed in order to determine the pull-in voltage. Comparison between simulated and measured results will be presented for the bridge type switch structure.

Citation Download Citation

D. Vasilache, G. Boldeiu, V. Moagar, and Catalin Tibeica "Bridge type and cantilever type MEMS switch structures", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 78210N (3 December 2010); https://doi.org/10.1117/12.881776

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