Paper
7 December 2010 Lateral shearing interferometry with a deformable mirror for wavefront analysis
F. Garoi, D. Apostol, P. Schiopu
Author Affiliations +
Proceedings Volume 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V; 782122 (2010) https://doi.org/10.1117/12.881723
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, 2010, Constanta, Romania
Abstract
A self-referencing inteferometric method of wavefront sensing based on lateral shearing interferometry, able to measure the local slope of a wavefront is described. For this, a deformable mirror is used to manipulate the testing wavefront and a Murty plane-parallel plate interferometer to analyze this wavefront. We demonstrate the interferometer by measuring a series of different wavefront shapes using coherent light. The principle of operation is presented together with practical implementation and experimental results.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Garoi, D. Apostol, and P. Schiopu "Lateral shearing interferometry with a deformable mirror for wavefront analysis", Proc. SPIE 7821, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies V, 782122 (7 December 2010); https://doi.org/10.1117/12.881723
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KEYWORDS
Wavefronts

Interferometers

Deformable mirrors

Interferometry

Sensors

Shearing interferometers

Wavefront analysis

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