Paper
14 September 2011 Surface sensitivity reduction in laser triangulation sensors
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Abstract
Laser triangulation sensors offer a simple, non-contact and fast solution to measure displacement, position, vibration and thickness. However, these sensors are prone to target surface sensitivity since they rely heavily on a uniform back-scatter of the laser spot. Here, sources of measurement noise including surface texture, speckle, beam deflection and asymmetry are discussed. In addition, a few solutions using dithering as well as the beam shaping to reduce surface sensitivity are explored. It is shown that a simple ditherer would induce additional error and a solution is suggested to compensate for it.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mehdi Daneshpanah and Kevin Harding "Surface sensitivity reduction in laser triangulation sensors", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330O (14 September 2011); https://doi.org/10.1117/12.893893
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Sensors

Speckle

Beam shaping

Detector arrays

Spatial light modulators

Distance measurement

Reflection

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