Reconstructing in laser wavelength scanning interference test of aspheric surface

Lulu Li; Wenchuan Zhao; Xianyu Su; Fan Wu; Bin Fan

doi:10.1117/12.2009280

16 October 2012 Reconstructing in laser wavelength scanning interference test of aspheric surface

Lulu Li, Wenchuan Zhao, Xianyu Su, Fan Wu, Bin Fan

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 841625 (2012) https://doi.org/10.1117/12.2009280
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Laser interferometry measurement using the volatility of light, with the advantages on high resolution, high accuracy, high sensitivity and reproducibility, it has become the primary means of the optical shape measurement. Laser wavelength scanning interference moves the test aspheric mirror in the optical axis direction controlled by the electric translation stage precisely, gradually changes the relative distance between the aspheric test mirror and the interferometer. Thus the reference sphere wavefronts with different radius match automatically to different ring-zones of the aspheric mirror. Based on the laser wavelength scanning interference testing of aspheric surface, this paper calculates the center area and the annular area separately. In the annular area processing, the authors use Zernike polynomials to fit the phase diagram, then derivative along the radial direction, to extract the zero-phase points on the interferogram of each relative position, and get the angle between the normal and the aspheric axis, then rebuild the absolute position of the coordinate system of aspheric mirror. Experimental results show that the method has high accuracy and reliability.

Citation Download Citation

Lulu Li, Wenchuan Zhao, Xianyu Su, Fan Wu, and Bin Fan "Reconstructing in laser wavelength scanning interference test of aspheric surface", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 841625 (16 October 2012); https://doi.org/10.1117/12.2009280

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