Recent advances in two-photon 3D laser lithography with self-Q-switched Nd:YAG microchip lasers

Patrice L. Baldeck; Prem Prabhakaran; Chao-Yuan Liu; Michel Bouriau; Laetitia Gredy; Olivier Stephan; Thomas Vergote; Hélène Chaumeil; Jean-Pierre Malval; Yi-Hsiung Lee; Chih-Lang Lin; Chin-Te Lin; Ya Hsun Hsueh; Tien-Tung Chung

doi:10.1117/12.2030152

10 September 2013 Recent advances in two-photon 3D laser lithography with self-Q-switched Nd:YAG microchip lasers

Patrice L. Baldeck, Prem Prabhakaran, Chao-Yuan Liu, Michel Bouriau, Laetitia Gredy, Olivier Stephan, Thomas Vergote, Hélène Chaumeil, Jean-Pierre Malval, Yi-Hsiung Lee, Chih-Lang Lin, Chin-Te Lin, Ya Hsun Hsueh, Tien-Tung Chung

Author Affiliations +

Proceedings Volume 8827, Optical Processes in Organic Materials and Nanostructures II; 88270E (2013) https://doi.org/10.1117/12.2030152
Event: SPIE Organic Photonics + Electronics, 2013, San Diego, California, United States

Abstract

We review our recent results towards the development of a turnkey 3D laser printer, based on self-Q-switched microchip Nd:YAG lasers, with reproducible sub-100nm resolution, and with large-scale (cm) and fast-speed (cm/sec) capability at micron resolution. First of all, we report on line fabrication with 70nm lateral, and 150nm longitudinal resolutions without significant shrinking. This is due to the tight focusing with green visible wavelength, large numerical aperture, and excellent resin properties. Secondly, we report on two-photon sensitive photoacid generators that lead to efficient 3D microfabrication with epoxy SU-8 resin. Thirdly, we demonstrate high-speed microfabrication of large scale, millimeter size, scaffolds and cemtimeter height needle with high repetition rate (130Khz), and high average power (1W) amplified microchip laser. Finally we demonstrate the two-photon induced cross-linking of antibodies to determine the type of red blood cells in microfluidic channels.

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Patrice L. Baldeck, Prem Prabhakaran, Chao-Yuan Liu, Michel Bouriau, Laetitia Gredy, Olivier Stephan, Thomas Vergote, Hélène Chaumeil, Jean-Pierre Malval, Yi-Hsiung Lee, Chih-Lang Lin, Chin-Te Lin, Ya Hsun Hsueh, and Tien-Tung Chung "Recent advances in two-photon 3D laser lithography with self-Q-switched Nd:YAG microchip lasers", Proc. SPIE 8827, Optical Processes in Organic Materials and Nanostructures II, 88270E (10 September 2013); https://doi.org/10.1117/12.2030152

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