Paper
27 September 2013 Carrier-gas enhanced vapor phase deposition for organic thin films: addressing mass manufacturing requirements for OLED devices, and overcoming existing challenges with OVPD
Juergen Kreis, Markus Schwambera, Dietmar Keiper, Markus Gersdorff, Michael Long, Michael Heuken
Author Affiliations +
Abstract
For OLEDs to become a mainstream technology, all major display companies are ramping up their efforts to enable cost efficient manufacturing on larger substrate sizes and higher throughput. This puts additional pressure on the suppliers of respective manufacturing equipment to address perceived challenges for scaling and throughput. This paper discusses perceived challenges in today’s manufacturing and how Organic Vapor Phase Deposition (OVPD®) can address these.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juergen Kreis, Markus Schwambera, Dietmar Keiper, Markus Gersdorff, Michael Long, and Michael Heuken "Carrier-gas enhanced vapor phase deposition for organic thin films: addressing mass manufacturing requirements for OLED devices, and overcoming existing challenges with OVPD", Proc. SPIE 8829, Organic Light Emitting Materials and Devices XVII, 88291C (27 September 2013); https://doi.org/10.1117/12.2026220
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Manufacturing

Organic light emitting diodes

Organic vapor phase deposition

Molecules

Thin films

Control systems

Deposition processes

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