Paper
7 March 2014 Fabrication technology to increase surface area of ionomer membrane material and its application towards high surface area electric double-layer capacitors
Alberto Andre Chang, Jasbir N. Patel, Cristina Cordoba, Bozena Kaminska, Karen Kavanagh
Author Affiliations +
Abstract
An application friendly technique to increase the surface area of the ionomer membrane such as Aquivion™ has been developed. By utilizing existing micro-fabrication technologies, square pillars were fabricated onto glass and silicon substrates. In combination with a low cost heat press, the glass and silicon stamps were used to successfully hot emboss micro-features onto the ionomer membrane. Consequently, the surface area of the Aquivion™ membrane was drastically increased enabling potential improvement of sensing and energy storage technologies. Preliminary results show successful fabrication of devices with systematic higher surface area and an improved capacitance.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alberto Andre Chang, Jasbir N. Patel, Cristina Cordoba, Bozena Kaminska, and Karen Kavanagh "Fabrication technology to increase surface area of ionomer membrane material and its application towards high surface area electric double-layer capacitors", Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 89730J (7 March 2014); https://doi.org/10.1117/12.2040273
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KEYWORDS
Electrodes

Capacitance

Capacitors

Silicon

Ions

Microfabrication

Semiconducting wafers

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