An active vibration isolation system using adaptive proportional control method

Yun-Hui Liu; Hung-En Hsieh; Wei-Hao Wu

doi:10.1117/12.2044765

10 March 2014 An active vibration isolation system using adaptive proportional control method

Yun-Hui Liu, Hung-En Hsieh, Wei-Hao Wu

Proceedings Volume 9057, Active and Passive Smart Structures and Integrated Systems 2014; 90572W (2014) https://doi.org/10.1117/12.2044765
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2014, San Diego, California, United States

Abstract

This paper is concerned with a six-degree-of-freedom active vibration isolation system using voice coil actuators with absolute velocity feedback control for highly sensitive measurement equipment, e.g. atomic force microscopes, suffering from building vibration. The main differences between this type of system and traditional isolator, is that there are no isolator resonance. The absolute vibration velocity signal acquired from an accelerator and being processed through an integrator is input to the controller as a feedback signal, and the controller output signal drives the voice coil actuator to produce a sky-hook damper force. In practice, the phase response of integrator at low frequency such as 2~6 Hz deviate from the 90 degree which is the exact phase difference between the vibration velocity and acceleration. Therefore, an adaptive filter is used to compensate the phase error in this paper. An analysis of this active vibration isolation system is presented, and model predictions are compared to experimental results. The results show that the proposed method significantly reduces transmissibility at resonance without the penalty of increased transmissibility at higher frequencies.

Citation Download Citation

Yun-Hui Liu, Hung-En Hsieh, and Wei-Hao Wu "An active vibration isolation system using adaptive proportional control method", Proc. SPIE 9057, Active and Passive Smart Structures and Integrated Systems 2014, 90572W (10 March 2014); https://doi.org/10.1117/12.2044765

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