Ablation of selected conducting layers by fiber laser

Ryszard Pawlak; Mariusz Tomczyk; Maria Walczak

doi:10.1117/12.2074240

19 August 2014 Ablation of selected conducting layers by fiber laser

Ryszard Pawlak, Mariusz Tomczyk, Maria Walczak

Proceedings Volume 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors; 92910P (2014) https://doi.org/10.1117/12.2074240
Event: 13th International Scientific Conference on Optical Sensors and Electronic Sensors, 2014, Lodz, Poland

Abstract

Laser Direct Writing (LDW) are used in the manufacture of electronic circuits, pads, and paths in sub millimeter scale. They can also be used in the sensors systems. Ablative laser writing in a thin functional layer of material deposited on the dielectric substrate is one of the LDW methods. Nowadays functional conductive layers are composed from graphene paint or nanosilver paint, indium tin oxide (ITO), AgHT^TM and layers containing carbon nanotubes. Creating conducting structures in transparent layers (ITO, AgHT and carbon nanotubes layers) may have special importance e.g. for flexi electronics. The paper presents research on the fabrication of systems of paths and appropriate pattern systems of paths and selected electronic circuits in AgHT^TM and ITO layers deposited on glass and polymer substrates. An influence of parameters of ablative fiber laser treatment in nanosecond regime as well as an influence of scanning mode of laser beam on the pattern fidelity and on electrical parameters of a generated circuit was investigated.

Citation Download Citation

Ryszard Pawlak, Mariusz Tomczyk, and Maria Walczak "Ablation of selected conducting layers by fiber laser ", Proc. SPIE 9291, 13th International Scientific Conference on Optical Sensors and Electronic Sensors, 92910P (19 August 2014); https://doi.org/10.1117/12.2074240

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