Propagation of focused ultrashort pulse laser during micromachining of sapphire

Chengwei Wang; Quanzhong Zhao; Jing Qian; Yangbo Li; Guande Wang; Yang Zhang; Huaihai Pan; Zongjie Bao; Feng Bai; Wenzhong Fan

doi:10.1117/12.2185003

14 July 2015 Propagation of focused ultrashort pulse laser during micromachining of sapphire

Chengwei Wang, Quanzhong Zhao, Jing Qian, Yangbo Li, Guande Wang, Yang Zhang, Huaihai Pan, Zongjie Bao, Feng Bai, Wenzhong Fan

Author Affiliations +

Proceedings Volume 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers; 95320O (2015) https://doi.org/10.1117/12.2185003
Event: Pacific Rim Laser Damage, 2015, Jiading, Shanghai, China

Abstract

Scattering effect has great effect on machining morphology in sapphire processed by ultrashort pulse laser. On one hand, scattering leads to saturation of machining length despite the increase of pulse energy. On the other hand, scattering results in undamaged core in the elliptical damaged shell. When the laser intensity is above half the damage threshold, the electric field is scattered to 0 and doesn’t contribute to the laser intensity at latter position. The physical model which combines scattering effect, linear and nonlinear optical effects matches well with machining morphology of sapphire at different laser parameters, including pulse energies, focus positions, focal length and pulse duration. At first laser with lower pulse energy, for instance 25 μJ, processes the inner part of sapphire. During micromachining of sapphire, the focus positions move from the bottom to the top. At last the laser with higher pulse energy, 150 μJ for example, fabricates the surface. The objective lens with the focal length of 20 mm is suitable for machining sapphire and the optimal pulse duration is 950 fs.

Citation Download Citation

Chengwei Wang, Quanzhong Zhao, Jing Qian, Yangbo Li, Guande Wang, Yang Zhang, Huaihai Pan, Zongjie Bao, Feng Bai, and Wenzhong Fan "Propagation of focused ultrashort pulse laser during micromachining of sapphire", Proc. SPIE 9532, Pacific Rim Laser Damage 2015: Optical Materials for High-Power Lasers, 95320O (14 July 2015); https://doi.org/10.1117/12.2185003

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