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14 March 2023 Development of CVD technology for halide perovskite-based optoelectronics (Conference Presentation)
Michael Heuken, Jona Riedel, Andrei Vescan, Holger Kalisch
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Proceedings Volume PC12441, Light-Emitting Devices, Materials, and Applications XXVII; PC124410I (2023) https://doi.org/10.1117/12.2648731
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Organic and inorganic halide perovskites have demonstrated rapid progress of optoelectronic figures-of-merit, strongly supporting their application in electroluminescent devices, photovoltaics as well as X-ray and optical detectors. However, the lack of a mature fabrication technology is a major challenge for their commercialization. Chemical vapor deposition (CVD) is an appealing choice due to its flexibility/scalability, high purity and superior process control. In this work, we present a prototype perovskite hot-wall CVD reactor, including details of powder-based sublimation sources, reactor design as well as selected results from deposited perovskite compounds, first optoelectronic devices and remaining challenges.
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Michael Heuken, Jona Riedel, Andrei Vescan, and Holger Kalisch "Development of CVD technology for halide perovskite-based optoelectronics (Conference Presentation)", Proc. SPIE PC12441, Light-Emitting Devices, Materials, and Applications XXVII, PC124410I (14 March 2023); https://doi.org/10.1117/12.2648731
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KEYWORDS
Chemical vapor deposition
Optoelectronics
Perovskite
X-ray optics
Process control
Prototyping
Quartz
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