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A speckle-based CMOS sensor array for arbitrary surface movement detection
Proc. SPIE 8069, 80690Z (2011); http://dx.doi.org/10.1117/12.884798
Monday 18 April 2011
Prague, Czech Republic
Integrated Photonics: Materials, Devices, and Applications
Ali Serpengüzel, Giancarlo C. Righini, Alfred Leipertz
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Add to FacebookThe paper presents a CMOS sensor array for the detection of speckle movements, for applications requiring accurate movement tracking of arbitrary surfaces. The array is made of eight sensors incorporating each a spatial comb filter with a pitch of 2.8μm so as to be direction-sensitive to the movement of speckles with corresponding direction and spatial frequency, defined by the optical geometry of the system. The circuit is used with an array of micro-lenses placed between the sensor and the laser-illuminated surface. With speckle statistics (contrast, size) being independent on the surface properties, the detection works on virtually any surface. The system is operated at a sampling frequency of 64kHz. Integrated into a 180nm CMOS process, the circuit active area occupies 1.9mm2 and consumes 290μW at full speed, allowing a maximal stable tracking speed of the surface of 0.25 m/s and a tracking accuracy of about 5μm.
© 2011 COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Online May 31, 2011
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Chao Wang, Steve Tanner and Pierre-André Farine, "A speckle-based CMOS sensor array for arbitrary surface movement detection",
Proc. SPIE 8069, 80690Z (2011); http://dx.doi.org/10.1117/12.884798
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