Dr. Akira Umeda Profile

Dr. Akira Umeda

at Technology Research Association of Inertial Sensors

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 1 September 1998 Paper

Development of TiNi shape memory alloy film deposited by sputtering from separate Ti and Ni targets

Akihiro Ohta, Shekhar Bhansali, Isao Kishimoto, Akira Umeda

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324049

KEYWORDS: Shape memory alloys, Sputter deposition, Titanium, Nickel, Silicon, Microelectromechanical systems, Crystals, Annealing, Temperature metrology, X-ray diffraction

Read Abstract +

Proceedings Article | 13 September 1996 Paper

Review on the importance of measurement technique in micromachine technology

Akira Umeda

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250942

KEYWORDS: Sensors, Motion measurement, Reliability, Analytical research, Velocity measurements, Metrology, Standards development, Silicon, Magnetism, Surface roughness

Read Abstract +

Proceedings Article | 13 September 1996 Paper

Davies bar as the reference for impact acceleration metrology

Akira Umeda, Kazunaga Ueda

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250943

KEYWORDS: Calibration, Interferometers, Motion measurement, Metrology, Reflection, Silicon, Manufacturing, Metals, Velocity measurements, Standards development

Read Abstract +

Proceedings Article | 13 September 1996 Paper

Investigation on the frequency response characteristics of an instrument for laser vibrometry and laser displacementmetry

Akira Umeda, Kazunaga Ueda

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250970

KEYWORDS: Interferometers, Laser development, Vibrometry, Reflection, Signal detection, Laser metrology, Wave propagation, Metals, Motion measurement, Transducers

Read Abstract +

Proceedings Volume Editor (1)

SPIE Conference Volume | 2 September 1997

Microlithography and Metrology in Micromachining III

Conference Committee Involvement (1)

Microlithography and Metrology in Micromachining III

29 September 1997 | Austin, TX, United States

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years