Dr. Chantal G. Khan-Malek Profile

Dr. Chantal G. Khan-Malek

at DERCI

SPIE Involvement:

Author

Publications (26)

Proceedings Article | 21 November 2001 Paper

Fabrication of high-aspect-ratio precision MEMS with LIGA using synchrotron radiation

Chantal Khan Malek

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448957

KEYWORDS: X-rays, Manufacturing, X-ray lithography, Microfabrication, Synchrotron radiation, Microsystems, Photomasks, Microelectromechanical systems, Lithography, Polymethylmethacrylate

Read Abstract +

Proceedings Article | 6 April 2001 Paper

X-ray micromachining of high-aspect-ratio MEMS using SU8 ultrathick photoresist

Chantal Khan Malek

Proceedings Volume 4234, (2001) https://doi.org/10.1117/12.424425

KEYWORDS: X-rays, Polymethylmethacrylate, Photoresist processing, X-ray lithography, Semiconducting wafers, Photoresist materials, Microelectromechanical systems, Printing, Micromachining, Manufacturing

Read Abstract +

Proceedings Article | 1 September 2000 Paper

Focused ion beam direct micromachining of DOEs

Chantal Khan Malek, Frank Hartley, Jayant Neogi

Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397932

KEYWORDS: Ion beams, Micromachining, Lithography, Etching, Optics manufacturing, X-ray lithography, Optical components, Ions, Zone plates, Gold

Read Abstract +

Proceedings Article | 21 July 2000 Paper

Maskless 3D micromachining with focused ion beam of high-resolution diffractive optics

Chantal Khan Malek, Frank Hartley, Jayant Neogi

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390040

KEYWORDS: Ion beams, Electron beam lithography, Zone plates, Lithography, Etching, Gold, Micromachining, Iodine, X-rays, Metals

Read Abstract +

Proceedings Article | 10 April 2000 Paper

High-aspect-ratio electroformed Ni-Co microstructures with improved mold adhesion using a LIGA-like process and a Novolak sublayer

Chantal Khan Malek, Lowell Thomas

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382315

KEYWORDS: Polymethylmethacrylate, Interfaces, X-rays, Adhesives, Metals, Photoresist processing, Polymers, Lithography, Plating, Electrons

Read Abstract +

Proceedings Article | 8 October 1999 Paper

Application domains for synchrotron radiation sources of various energies

Chantal Khan Malek, Volker Saile

Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368455

KEYWORDS: Synchrotron radiation, Synchrotrons, Electrons, X-rays, Magnetism, Particles, Light sources, X-ray lithography, Electron beams, Superconductors

Read Abstract +

Proceedings Article | 8 October 1999 Paper

Nanometer x-ray lithography

Frank Hartley, Chantal Khan Malek

Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368464

KEYWORDS: X-rays, Photomasks, X-ray lithography, Printing, Lithography, Optical lithography, Photoresist materials, Ultraviolet radiation, Gold, Ion beams

Read Abstract +

Proceedings Article | 3 September 1999 Paper

Prototyping for high-aspect-ratio MEMS by high-energy x-ray lithography using boron-carbide-based masks

Chantal Khan Malek, Steven Nguyen

Proceedings Volume 3875, (1999) https://doi.org/10.1117/12.360477

KEYWORDS: Photomasks, X-rays, X-ray lithography, Boron, Polymethylmethacrylate, Gold, Silicon, Silicon carbide, Beryllium, Prototyping

Read Abstract +

Proceedings Article | 20 July 1999 Paper

LIGA-like process for high-aspect-ratio PZT microstructures

Gil Lee, Yoonyoung Jin, Sangwon Park, Pratul Ajmera, Chantal Khan Malek, Jin Wang, F. Tang

Proceedings Volume 3673, (1999) https://doi.org/10.1117/12.354296

KEYWORDS: Ferroelectric materials, Polymethylmethacrylate, X-rays, Thin films, Fabrication, Photoresist processing, Silicon, Image resolution, Medical imaging, Projection systems

Read Abstract +

Proceedings Article | 1 September 1998 Paper

Mask prototyping for ultradeep x-ray lithography: preliminary studies for mask blanks and high-aspect-ratio absorber patterns

Chantal Khan Malek

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324070

KEYWORDS: Photomasks, X-ray lithography, Silicon, X-rays, Semiconducting wafers, Printing, Polymethylmethacrylate, Beryllium, Optical lithography, Photoresist materials

Read Abstract +

Proceedings Article | 20 July 1998 Paper

Planarization of metallic parts for single- and multilevel (S)LIGA

Chantal Khan Malek, Robert Wood, Perry Genova

Proceedings Volume 3328, (1998) https://doi.org/10.1117/12.320158

KEYWORDS: Nickel, Surface finishing, Polymethylmethacrylate, Polishing, Electroplating, Plating, Metals, Microelectromechanical systems, X-ray lithography, Semiconducting wafers

Read Abstract +

Proceedings Article | 29 June 1998 Paper

DUV synchrotron exposure station at CAMD

Chantal Khan Malek, Volker Saile, J. Michael Klopf, Louis Rupp, Steven Nguyen

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310729

KEYWORDS: Deep ultraviolet, X-ray lithography, Lithography, Mirrors, Synchrotron radiation, Synchrotrons, Silicon, X-rays, Photons, Ultraviolet radiation

Read Abstract +

Proceedings Article | 5 June 1998 Paper

X-ray exposures of electrodeposited photoresist for conformal lithography on corrugated surfaces

Frank Hartley, Chantal Khan Malek, Steven Nguyen

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309615

KEYWORDS: X-ray lithography, X-rays, Photoresist materials, Photomasks, Copper, Lithography, Ultraviolet radiation, Optical lithography, Reflection, Thin films

Read Abstract +

Proceedings Article | 2 September 1997 Paper

Analysis and enhancement of bond strength of acrylic sheets to metallic substrates for use in LIGA-type processing

Supipta Das, Harish Manohara, Chantal Khan Malek

Proceedings Volume 3225, (1997) https://doi.org/10.1117/12.284544

KEYWORDS: Polymethylmethacrylate, Photoresist materials, Polymerization, Copper, Titanium, Annealing, Interfaces, Analytical research, Oxidation

Read Abstract +

Proceedings Article | 2 September 1997 Paper

Cost-effective mask fabrication on Kapton membrane for deep x-ray lithography

Stefan Stadler, I. Derhalli, Chantal Khan Malek

Proceedings Volume 3225, (1997) https://doi.org/10.1117/12.284546

KEYWORDS: X-ray lithography, Mask making, Photomasks, Optical lithography, Gold, Electroplating, Resistance

Read Abstract +

Proceedings Article | 13 September 1996 Paper

Multiexposure capability development for deep x-ray lithography for MEMS

Chantal Khan Malek, Robert Wood, Bruce Dudley, Zhong Ling, Volker Saile

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250947

KEYWORDS: Optical alignment, Photomasks, X-rays, Semiconducting wafers, X-ray lithography, X-ray optics, Transmittance, Silicon, Microelectromechanical systems, Prototyping

Read Abstract +

Proceedings Article | 13 September 1996 Paper

Dimensional variation and roughness of LIGA fabricated microstructures

Charles Egert, Robert Wood, Chantal Khan Malek

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250953

KEYWORDS: Polymethylmethacrylate, Profilometers, Photomasks, X-rays, X-ray lithography, Assembly tolerances, Tolerancing, Nickel, Calibration, Gold

Read Abstract +

Proceedings Article | 13 September 1996 Paper

Cyanoacrylate bonding of thick resists for LIGA

James Rogers, Christophe Marques, Kevin Kelly, Venkat Sangishetty, Chantal Khan Malek

Proceedings Volume 2880, (1996) https://doi.org/10.1117/12.250949

KEYWORDS: Polymethylmethacrylate, Nickel, Electroplating, Interfaces, Lithography, Photoresist processing, X-rays, Metals, Microsystems, Silicon

Read Abstract +

Proceedings Article | 26 September 1995 Paper

Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques

Reid Brennen, Michael Hecht, Dean Wiberg, Steven Manion, William Bonivert, Jill Hruby, Marcus Scholz, Timothy Stowe, Thomas Kenny, Keith Jackson, Chantal Khan Malek

Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222650

KEYWORDS: Polymethylmethacrylate, X-rays, Photomasks, Electroplating, Metals, Plating, Gold, Semiconducting wafers, Copper, X-ray imaging

Read Abstract +

Proceedings Article | 26 September 1995 Paper

Fabrication of miniaturized electrostatic deflectors using LIGA

Keith Jackson, Chantal Khan Malek, Lawrence Murray, William Bonivert, Jill Hruby, John Hachman, T. Chang

Proceedings Volume 2640, (1995) https://doi.org/10.1117/12.222649

KEYWORDS: Photomasks, Gold, X-rays, Lenses, Electrodes, Plating, Distortion, Tolerancing, Silicon, Electroplating

Read Abstract +

Proceedings Article | 21 January 1993 Paper

Fabrication and performance of linear multilayer gratings in the 44-130 Angstrom wavelength range

Pierre Boher, Philippe Houdy, Chantal Khan Malek, F. Ladan, S. Bac, Daniel Schirmann, Philippe Troussel, Michael Krumrey, Peter Mueller, Frank Scholze

Proceedings Volume 1742, (1993) https://doi.org/10.1117/12.140580

KEYWORDS: Multilayers, Carbon, X-rays, Diffraction gratings, Reflectivity, Silicon, Gold, Sensors, Reflection, Interfaces

Read Abstract +

SPIE Journal Paper | 1 February 1992

Diffraction properties of a 0.24-μm period multilayer laminar amplitude grating in the soft x-ray region

H. Berrouane, Chantal Khan Malek, Jean-Michel Andre, F. Ladan, Jean-Rene Rivoira, Robert Barchewitz

OE, Vol. 31, Issue 02, (February 1992) https://doi.org/10.1117/12.10.1117/12.56082

KEYWORDS: Diffraction gratings, Diffraction, Mirrors, X-rays, Sensors, X-ray diffraction, Plasma, Holography, Reactive ion etching, Kinematics

Read Abstract +

SPIE Journal Paper | 1 August 1991

Fabrication of high-resolution multilayer reflection zone plate microlense for the soft x-ray range

Chantal Khan Malek, F. Ladan, Jean-Rene Rivoira

OE, Vol. 30, Issue 08, (August 1991) https://doi.org/10.1117/12.10.1117/12.55909

KEYWORDS: Zone plates, Mirrors, X-rays, Etching, Reflectivity, Molybdenum, Microlens, X-ray optics, Lenses, Lithography

Read Abstract +

Proceedings Article | 1 February 1991 Paper

Fabrication of multilayer Bragg-Fresnel zone plates for the soft x-ray range

Chantal Khan Malek, T. Moreno, Philippe Guerin, F. Ladan, Jean-Rene Rivoira, Robert Barchewitz

Proceedings Volume 1343, (1991) https://doi.org/10.1117/12.23231

KEYWORDS: Zone plates, Mirrors, Etching, X-rays, Reflectivity, Multilayers, Plasma, X-ray optics, Microfabrication, Electron beam lithography

Read Abstract +

Proceedings Article | 1 February 1991 Paper

Fabrication and performance at 1.33 nm of a 0.24-um period multilayer grating

H. Berrouane, Chantal Khan Malek, Jean-Michel Andre, L. Lesterlin, F. Ladan, Jean-Rene Rivoira, Yves Lepetre, Robert Barchewitz

Proceedings Volume 1343, (1991) https://doi.org/10.1117/12.23230

KEYWORDS: Diffraction gratings, Diffraction, Mirrors, Multilayers, Astronomical imaging, X-ray optics, X-ray astronomy, Astronomy, Microscopy, Polarimetry

Read Abstract +

SPIE Journal Paper | 1 June 1990

Semitransparent soft x-ray multilayer mirrors

Chantal Khan Malek, Jean Susini, A. Madouri, M. Ouahabi, Jean-Rene Rivoira, F. Ladan, Yves Lepetre, Robert Barchewitz

OE, Vol. 29, Issue 06, (June 1990) https://doi.org/10.1117/12.10.1117/12.55634

KEYWORDS: Multilayers, X-rays, Mirrors, Beam splitters, X-ray characterization, Thin film deposition, Optical lithography, Anisotropic etching, Etching, Silicon carbide

Read Abstract +