Dr. Christos F. Karanikas Profile

Dr. Christos F. Karanikas

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Publications (3)

Proceedings Article | 27 March 2014 Paper

Spin on lithographic resist trim process optimization and process window evaluation

Christos Karanikas, J. Taylor, Naveen Vaduri, Tafsirul Islam

Proceedings Volume 9051, 90511L (2014) https://doi.org/10.1117/12.2045908

KEYWORDS: Photoresist processing, Logic, Semiconducting wafers, Lithography, Image processing, Optical lithography, Critical dimension metrology, Line edge roughness, Diffractive optical elements, Etching

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Proceedings Article | 29 March 2013 Paper

Investigation of trench and contact hole shrink mechanism in the negative tone develop process

Sohan Singh Mehta, Craig Higgins, Vikrant Chauhan, Shyam Pal, Hui Peng Koh, Jean Raymond Fakhoury, Shaowen Gao, Lokesh Subramany, Salman Iqbal, Bumhwan Jeon, Pedro Morrison, Chris Karanikas, Yayi Wei, David Cho

Proceedings Volume 8682, 86820O (2013) https://doi.org/10.1117/12.2012331

KEYWORDS: Diffusion, Critical dimension metrology, Polymers, Photoresist processing, Image processing, Manufacturing, Lithography, Optical lithography, Data modeling, Modulation

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Proceedings Article | 29 March 2013 Paper

The effects of reduced resist consumption process conditions on total raw defects, line and space defects and single line open defects at the 20nm node

Christos Karanikas, Jeong Soo Kim

Proceedings Volume 8682, 868227 (2013) https://doi.org/10.1117/12.2011209

KEYWORDS: Scanning laser ophthalmoscopy, Photoresist processing, Metals, Interfaces, Ions, Critical dimension metrology, Silicon, Semiconducting wafers, Semiconductors, Photoresist materials

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