Erwin Deng
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 12 June 2018 Paper
Xiang Fang, Shou-Yuan Ma, Chien-Nan Lin, Hsu-Tang Liu, Chuan-Chun Lee, Chuen-Huei Yang, I-Y. Chang, Erwin Deng, Ming-Feng Shen, Min-Ying Lu, Ling-Chieh Lin, Hung-Yueh Liao, Elven Huang, Jonathan Muirhead
Proceedings Volume 10807, 108070L (2018) https://doi.org/10.1117/12.2323956
KEYWORDS: Design for manufacturing, Databases, Rule based systems, Semiconducting wafers, System identification, Visualization, Photomasks, Lutetium, Microelectronics, Design for manufacturability

Proceedings Article | 13 July 2017 Paper
Jian-Cheng Chen, Min-Ying Lu, Xiang Fang, Ming-Feng Shen, Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell
Proceedings Volume 10454, 104540G (2017) https://doi.org/10.1117/12.2278691
KEYWORDS: Reticles, Databases

Proceedings Article | 10 May 2016 Paper
Shou-Yuan Ma, Chuen-Huei Yang, Joe Tsai, Alice Wang, Roger Lin, Rachel Lee, Erwin Deng, Ling-Chieh Lin, Hung-Yueh Liao, Jenny Tsai, Amanda Bowhill, Hien Vu, Gordon Russell
Proceedings Volume 9984, 99840D (2016) https://doi.org/10.1117/12.2240292
KEYWORDS: Photomasks, Semiconducting wafers, Reticles, Data conversion, Acquisition tracking and pointing, Neodymium, Radon, Databases, Visualization, Etching

Proceedings Article | 9 July 2015 Paper
Chuen Huei Yang, Shaina Lin, Roger Lin, Alice Wang, Rachel Lee, Erwin Deng
Proceedings Volume 9658, 96580Y (2015) https://doi.org/10.1117/12.2192951
KEYWORDS: Photomasks, Semiconducting wafers, Optical proximity correction, Optical lithography, Inspection, Double patterning technology, Distortion, Silicon, Communication engineering, Etching

Proceedings Article | 28 June 2013 Paper
Erwin Deng, Rachel Lee, Chun Der Lee
Proceedings Volume 8701, 87010L (2013) https://doi.org/10.1117/12.2028297
KEYWORDS: Photomasks, Statistical modeling, Electronic design automation, Control systems, Data modeling, Failure analysis, Microelectronics, Inspection, Semiconducting wafers

Showing 5 of 7 publications
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