Mr. Johannes Belkner Profile

Johannes Belkner

at Technische Univ. Ilmenau

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 15 August 2023 Presentation + Paper

Double-pass modulated differential confocal microscopy for closed-loop axial control of direct laser writing

Johannes Belkner, Jaqueline Stauffenberg, Christian Görner Tenorio, Ingo Ortlepp, Eberhard Manske

Proceedings Volume 12618, 126180R (2023) https://doi.org/10.1117/12.2673874

KEYWORDS: Confocal microscopy, Modulation, Microscopes, Interferometers, Manufacturing, Lithography, Aspheric lenses, Signal detection, Field programmable gate arrays, Optical metrology, 3D profilers

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Proceedings Article | 20 June 2021 Presentation + Paper

Compensating aberration induced error in differential confocal microscopy

Johannes Belkner, Ingo Ortlepp, Uwe Gerhardt, Eberhard Manske

Proceedings Volume 11782, 117820P (2021) https://doi.org/10.1117/12.2592392

KEYWORDS: Confocal microscopy, Adaptive optics, Mirrors, 3D metrology, Wavefront distortions, Spherical lenses, Signal to noise ratio, Microscopy, Metrology, Interferometers

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Proceedings Article | 1 April 2020 Presentation + Paper

Demonstration of aberration-robust high-frequency modulated differential confocal microscopy with an oscillating pinhole

Johannes Belkner, Martin Hofmann, Johannes Kirchner, Eberhard Manske

Proceedings Volume 11352, 113520N (2020) https://doi.org/10.1117/12.2555558

KEYWORDS: Confocal microscopy, Modulation, Objectives, Sensors, Signal to noise ratio, Monochromatic aberrations, Microelectromechanical systems, Signal detection

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Proceedings Article | 21 June 2019 Presentation + Paper

Novel chromatic confocal differential interference contrast prototype

Johannes Belkner, Hsiu-Wen Liu, Eberhard Manske, Liang-Chia Chen

Proceedings Volume 11056, 1105611 (2019) https://doi.org/10.1117/12.2527854

KEYWORDS: Confocal microscopy, Calibration, Spectroscopy, Objectives, Manufacturing, 3D profilers, Chromatic aberrations, Birefringence

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