Dr. Reika Katsumata Profile

Dr. Reika Katsumata

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Publications (3)

Proceedings Article | 25 March 2019 Paper

Ultra-thin conformal coating for spin-on doping applications

Mingqi Li, Bhooshan Popere, Peter Trefonas, Andrew Heitsch, Ratchana Limary, Reika Katsumata, Yuanyi Zhang, Rachel Segalman

Proceedings Volume 10960, 109600R (2019) https://doi.org/10.1117/12.2514830

KEYWORDS: Polymers, Doping, Coating, Silicon, Boron, Semiconducting wafers, Polymer thin films, Annealing, Semiconductors, Chemical species

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Proceedings Article | 25 March 2019 Paper

Ordered polymer-based spin-on dopants

Bhooshan Popere, Peter Trefonas, Andrew Heitsch, Mingqi Li, Ratchana Limary, Megan Hoarfrost, Kiniharu Takei, Victor Ho, Ali Javey, Yuanyi Zhang, Reika Katsumata, Rachel Segalman

Proceedings Volume 10960, 1096023 (2019) https://doi.org/10.1117/12.2514822

KEYWORDS: Polymers, Silicon, Annealing, Doping, Polymer thin films, Boron, Chemical species, Diffusion, Ions, Antimony

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Proceedings Article | 25 March 2019 Presentation + Paper

Selective spin-on deposition of polymers on heterogeneous surfaces

Yuanyi Zhang, Colton D'Ambra, Reika Katsumata, Rachel Segalman, Craig Hawker, Christopher Bates

Proceedings Volume 10960, 109600Q (2019) https://doi.org/10.1117/12.2515666

KEYWORDS: Polymers, Copper, Coating, Dewetting, Thin film coatings, Self-assembled monolayers, Semiconductors

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