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Shin Toyota
at Nippon Telegraph and Telephone Corp
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Author
Publications (1)
Proceedings Article | 2 March 2020 Paper
Reflection-type diffractive optical element employing SiC and Si for application to high power laser material processing
Proceedings Volume 11273, 112730K (2020) https://doi.org/10.1117/12.2544199
KEYWORDS: Silicon carbide, Silicon, Diffractive optical elements, Beam shaping, High power lasers, Materials processing, Thermal effects, Energy conversion efficiency, Absorption, Semiconducting wafers
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