Mr. Tjarko van Empel Profile

Tjarko van Empel

at ASML Netherlands BV

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Publications (2)

Proceedings Article | 10 October 2019 Paper

EUV reticle defectivity protection options

Michael Lercel, Christophe Smeets, Mark van de Kerkhof, Amo Chen, Tjarko van Empel, Vadim Banine

Proceedings Volume 11148, 111480Y (2019) https://doi.org/10.1117/12.2535396

KEYWORDS: Pellicles, Extreme ultraviolet, Scanners, Reticles, Inspection, Extreme ultraviolet lithography, Manufacturing, Deep ultraviolet, Statistical modeling, Statistical analysis

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Proceedings Article | 26 March 2019 Presentation + Paper

Advanced particle contamination control in EUV scanners

Mark van de Kerkhof, Tjarko van Empel, Michael Lercel, Christophe Smeets, Ferdi van de Wetering, Andrey Nikipelov, Christian Cloin, Andrei Yakunin, Vadim Banine

Proceedings Volume 10957, 109570U (2019) https://doi.org/10.1117/12.2514874

KEYWORDS: Particles, Reticles, Scanners, Pellicles, Plasma, Extreme ultraviolet, Particle contamination

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