In this work, we present the experimental results of a new wafer-level production platform for aluminum nitride based piezoelectric micromachined ultrasonic transducers (PMUTs), operated by lower than 10 V peak-to-peak signals, and covering ultrasonic frequency ranges from 200 kHz up to 10 MHz, with measured axial displacements ranging from a few nanometers up to 600 nm. The fabricated devices have a low footprint of (130x130) μm2. The experimental results are in excellent agreement with finite-element method simulations. The small footprint and driving voltages of these piezo-microactuators are well suited for the development of micropump and micromixer designs for portable microfluidics applications.
Shadi Khazaaleh, Numan Saeed, Inas Taha, Mateusz T. Madzik, and Jaime Viegas, "Piezoelectric micromachined ultrasonic transducers and micropumps: from design to optomicrofluidic applications," Proc. SPIE 10061, Microfluidics, BioMEMS, and Medical Microsystems XV, 100610S (Presented at SPIE BiOS: January 30, 2017; Published: 27 March 2017); https://doi.org/10.1117/12.2254733.
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