Two types of the large bimorph deformable mirrors with the size of 410x468 mm and 320 mm were developed and tested. The results of the measurements of the response functions of all the actuators and of the surface shape of the deformable mirror are presented in this paper. The study of the mirror with a Fizeau interferometer and a Shack- Hartmann wavefront sensor has shown that it was possible to improve the flatness of the surface down to a residual roughness of 0.033 μm (RMS). The possibility of correction of the aberrations in high power lasers was numerically demonstrated.
Alexis Kudryashov, Vadim Samarkin, Alex Aleksandrov, Gilles Borsoni, Takahisa Jitsuno, Pavel Romanov, and Julia Sheldakova, "Extremely large bimorph deformable mirror for high intense laser beam correction," Proc. SPIE 10084, High Power Lasers for Fusion Research IV, 1008408 (Presented at SPIE LASE: January 30, 2017; Published: 23 February 2017); https://doi.org/10.1117/12.2257461.
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Study of self-shadowing effect as a simple means to realize nanostructured thin films and layers with special attentions to birefringent obliquely deposited thin films and photo-luminescent porous silicon