Superimposed multiple shots of low-fluence femtosecond (fs) laser pulses form a periodic nanostructure on solid surfaces through ablation. We have demonstrated that the self-organization process of nanostructuring can be regulated to fabricate a homogeneous nanograting on the target surface in air. A simple two-step ablation process and an ablation technique using interfering fs laser beams were developed to control plasmonic near-fields generated by fs laser pulses. The results have shown the nature of a single spatial standing wave mode of surface plasmon polaritons of which periodically enhanced near-fields ablate the target surface, to fabricate the nanograting on gallium nitride (GaN) and metals such as stainless steel (SUS) and titanium (Ti).
Godai Miyaji and Kenzo Miyazaki, "Nanograting formation in air through plasmonic near-field ablation induced by femtosecond laser pulses," Proc. SPIE 10091, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII, 100910T (Presented at SPIE LASE: February 01, 2017; Published: 20 February 2017); https://doi.org/10.1117/12.2256115.
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