In this study, we investigated fabrication of low-loss waveguide in fused silica by using the fundamental beam (1030nm) from an Yb solid-state femtosecond laser with a pulse duration of 250 fs. The NA of focusing objective lens was 0.42. The fabricated waveguide was made to have a circular cross-section by shaping laser beam with a slit. We fixed repetition rate to 150 kHz, and identified appropriate scan speed and pulse energy for fabrication of low loss waveguide. Waveguide fabricated with appropriate condition had a propagation loss of 0.2 dB/cm, and this is the first report on optical waveguides in a fused silica fabricated by femto-second laser pulses at a wavelength of 1030nm.
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