An ultra-compact Electro-Magnetic (EM) Wave Sensor working at 14GHz is designed and demonstrated experimentally. The sensor is based on electro-optics (EO) modulation and therefore has several important advantages over conventional electrical RF sensors including compact size and immunity to electromagnetic interference (EMI). The proposed sensor contains a set of bowtie antenna and a Mach-Zehnder interferometer (MZI) structure with one arm of slow-light enhanced EO polymer infiltrated one dimensional (1D) photonic crystal slotted waveguide and the other arm of silicon strip waveguide with tooth. To minimize the RC delay as well as the electrical connection between the two bowtie antenna, the innovative silicon tooth design are applied for both arms of the MZI respectively so that the device can be operated at 14Ghz. The bowtie antenna concentrates electrical field of the impinging wireless EM wave at its designed frequency of 14Ghz and applies it onto the EO polymer filled slot for modulating phase of the guided optical wave. By combining the effect of strong slow light effect of the slotted PCW, high field enhancement of the bowtie antenna, and also large EO coefficient of the EO polymer(r33=135pm/V), the device is only 4.6mmX4.8mm in size with active region of 300μm and has minimum detectable electromagnetic power density as low as 27 mW/m2.
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